The final optics assembly (FOA) holds the last and individually most expensive large optics in large high-power lasers.T......

采用音圈电机实现直线位移校正，采用最少拍控制理论对音圈电机进行位置反馈控制，实现了快速响应，无稳态误差，超调小，扰动快速恢复，高分辨......